AIXTRON SEVice President Corporate Research & Development at AIXTRON SE


Professor Heuken received the Diplom-Ingenieur degree and the Dr.-Ing. degree in Electrical Engineering from Duisburg University, Germany. He joined the Institut für Halbleitertechnik at RWTH Aachen as senior engineer and has been working in the field of metalorganic vapor phase epitaxy for electronic and optoelectronic devices. In 1994 he finished his Habilitation in semiconductor technology and devices with a thesis on MOCVD technology for optoelectronic devices. Since then and still at present he has been lecturer for semiconductor technology and devices as well as circuits for communication systems at RWTH. In 1997 he joined AIXTRON in Aachen-Germany where he is now Vice President Corporate Research & Development.
In 1999 he was honoured as Professor at RWTH Aachen. His main research interests are in the fields of Semiconductor growth by MOVPE, materials characterization, device technology, electronic and optoelectronic devices and circuits.
Prof Heuken is author and co-author of more than 590 publications in international journals and several invited papers at international conferences. He was President of DGKK (German Crystal Growth Association) from 2002 to 2005, board member of EPIC (European Photonics Industry Consortium) from 2007 to 2013, currently is board member of OptechNet e.V and member of VDE/ITG. He acts as referee for international Journals. He has been granted several patents in the field of CVD technology.


Main supervisor of PhD 15

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